2005 Kikkawa Laboratory @ RCNS, Hiroshima Univ. All rights reserved.
Kikkawa laboaraory is with the Research Center for Nanodevices and Systems
and Graduate School of Advanced Sciences of Matter, Hiroshima University.
The research focuses on: (a) Material science and reliability physics
for low-k interlayer dielectrics, high-k capacitor and Cu interconnects.
This study is in collaboration with the Semiconductor MIRAI project (Millennium
Research for Advanced Information Technology project), and is supported
by the New Energy and Industrial Technology Organization (NEDO) under the
management of the Association of Super-Advanced Electronics Technologies
(ASET) and (b) Ultrahigh-speed global interconnect technology using silicon
integrated antennas and RF transmission lines, This study is supported
by the Ministry of Education, Culture, Sports, Science and Technology,
Japan under the 21st Century COE program and the Grant-in-Aid for Scientific
Research by JSPS.